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  • 真空镀膜设备这些知识,你都了解吗?
  • 来源:http://www.robergaez.com发布日期:2019-08-09 14:07 浏览次数:
关于真空镀膜设备各人都相识几多呢?本日小编着重就真空镀膜设备的利用步调、合用范畴以及维护和调养要领等做以下先容,但愿对小同伴们有用!
 
看点一
 
什么是真空镀膜设备?
 
 
真空镀膜设备主要指一类需要在较高真空度下举办的镀膜,详细包罗许多种类,包罗真空离子蒸发,磁控溅射,MBE分子束外延,PLD激光溅射沉积等许多种。主要思路是分成蒸发和溅射两种。
 
 
需要镀膜的被成为基片,镀的质料被成为靶材。 基片与靶材同在真空腔中。
 
 
蒸发镀膜一般是加热靶材使外貌组分以原子团或离子形式被蒸发出来,而且沉降在基片外貌,通过成膜进程(散点-岛状布局-迷走布局-层状发展)形成薄膜。 对付溅射类镀膜,可以简朴领略为操作电子或高能激光轰击靶材,并使外貌组分以原子团或离子形式被溅射出来,而且最终沉积在基片外貌,经验成膜过蒸发镀膜设备+所镀产物图蒸发镀膜设备+所镀产物图程,最终形成薄膜。
真空镀膜设备利用步调
 
 
1电控柜的操纵
 
 
1)开水泵、气源
 
 
2)开总电源
 
 
3)开维持泵、真空计电源,真空计档位置V1位置,期待其值小于10后,再进入下一步操纵。约需5分钟。
 
 
4)开机器泵、予抽,开涡轮分子泵电源、启动,真空计开关换到V2位置,抽到小于2为止,约需20分钟。
 
 
5)调查涡轮分子泵读数达到250今后,关予抽,开前机和高阀继承抽真空,抽真空达到必然水平后才气开右边的高真空表头,调查真空度。真空达到2×10-3今后才气开电子枪电源。
 
 
2DEF-6B电子枪电源柜的操纵
 
 
1)打开总电源
 
 
2)同时开电子枪节制Ⅰ和电子枪节制Ⅱ电源:按电子枪节制Ⅰ电源、延时开关,延时、电源及掩护灯亮,三分钟后延时及掩护灯灭,若后门未关好或水流继电器有妨碍,掩护灯会常亮。
 
 
3)开高压,高压会到达10KV以上,调理束流可到200mA阁下,帘栅为20V/100mA,灯丝电流1.2A,偏转电流在1~1.7之间摆动。
 
 
3关机顺序
 
 
1)关高真空表头、关分子泵。
 
 
2)待分子泵显示到50时,依次关高阀、前级、机器泵,这期间约需40分钟。
 
 
3)到50以下时,再关维持泵。
 
 
看点三
 
真空镀膜设备合用范畴
 
 
1、修建五金:卫浴五金(如水龙头)、门锁、门拉手、卫浴、门锁、五金合叶、家具等。
 
 
2、制表业:可用于表壳、表带的镀膜、水晶成品。
 
 
3、其它小五金:皮革五金、不锈钢餐具、眼镜框、刀具、模具等。
 
 
4、大型工件:汽车轮毂、不锈钢板、招牌、雕塑等。
 
 
5、不锈钢管和板(各类范破例貌)
 
 
6、家具、灯具、宾馆用具
 
 
7、锁具、拉手、卫浴五金、高尔夫球头、不锈钢餐具、器血等五金成品镀超硬装饰膜。
 
 
8、眼镜、首饰等装饰品镀超耐磨装饰(金银)纳米膜和纳米膜和纳米叠层膜。
维护和调养要领
 
 
1、真空镀膜设备每完成200个镀膜措施以上,应洁净事情室一次。
 
 
要领是:用烧碱(NaOH)饱和溶液重复擦洗真空室内壁,( 留意人体皮肤不行以直接打仗烧碱溶液,以免灼伤)目标是使镀上去的膜料铝(AL)与NaOH产生回响,回响后膜层脱落,并释放出氢气。再用清水清洗真空室和用布沾汽油清洗精抽阀内的污垢。
 
 
2、当粗抽泵(滑阀泵,旋片泵)持续事情一个月(雨季减半),需改换新油。
 
 
要领是:拧开放油螺栓,放掉旧油,再将泵启动数秒,使泵内的旧油完全排放出来。拧回放油螺栓,插手新油至额定量(油视镜调查)。持续利用半年以上,换油时应将油盖打开,用布擦清洁箱内污垢。
 
 
3、扩散泵持续利用6个月以上,抽速明明变慢,或操纵失当,充入大气,拆去联络水管,卸下电炉盘,将一级喷嘴拧出,中岳钛金,先用汽油将泵腔及泵胆清洗一遍,再用洗衣粉兑水清洗一遍,然后用清水彻底清洗清洁,待水份挥发干今后,装好泵胆,插手新扩散泵油,并装回机体,接好水管,装好电炉盘,便可以从头开机。在从头开机前,要留意检漏事情。要领是:启动维持泵,关好大门,数分钟后,调查扩散泵部门真空度是否到达6X10帕,不然要举办检漏。查抄联接处是否装密封胶圈,或压坏密封圈。解除漏气隐患后方可加热,不然扩散泵油会烧环,无法进入事情状态。
How much do you know about vacuum coating equipment? Today xiaobian focuses on the use of vacuum coating equipment steps, scope of application and maintenance and maintenance methods to do the following introduction, I hope to partners useful!
 
 
 
What to watch for a
 
 
 
What is vacuum coating equipment?
 
 
 
 
 
Vacuum coating equipment mainly refers to a kind of coating equipment that needs to be prepared under a higher vacuum degree, including many kinds, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, etc. The main idea is divided into evaporation and sputtering two.
 
 
 
 
 
Those that need coating are called substrates and those that need plating are called targets. The substrate is in a vacuum chamber with the target.
 
 
 
 
 
Evaporation coating is generally used to heat the target material so that the surface components are evaporated in the form of atomic groups or ions, and settle on the surface of the substrate to form a thin film through the film-forming process (scatter - island structure - vagal structure - lamellar growth). For sputtering coating, it can be simply understood that the target material is bombarded with electrons or high-energy laser, and the surface components are sputtered out in the form of atomic groups or ions. Finally, the surface is deposited on the substrate surface, which goes through the process of film-forming over-evaporation coating equipment + product diagram + product diagram, and finally forms a thin film.
 
Use steps of vacuum coating equipment
 
 
 
 
 
Operation of electric control cabinet
 
 
 
 
 
1) open water pump and air source
 
 
 
 
 
2) open the main power supply
 
 
 
 
 
3) start and maintain the pump, vacuum gauge power supply, and vacuum gauge file position V1. Wait for the value less than 10 before entering the next operation. It takes about five minutes.
 
 
 
 
 
4) turn on the mechanical pump and pump, turn on the power supply of the turbo molecular pump and start it. Switch the vacuum meter to the position of V2 and pump until it is less than 2, which takes about 20 minutes.
 
 
 
 
 
5) observe that after the reading of turbo molecular pump reaches 250, close the pump, open the front engine and the high valve to continue to vacuum, and only after the vacuum reaches a certain level can the high vacuum gauge on the right be opened to observe the vacuum degree. Only after the vacuum reaches 2×10-3 can the power of the electron gun be turned on.
 
 
 
 
 
Operation of 2def-6b electron gun power cabinet
 
 
 
 
 
1) turn on the main power
 
 
 
 
 
2) at the same time open Ⅰ gun control and gun control Ⅱ power: according to the electron gun control Ⅰ power supply, delay switch, delay, power and to protect the light, three minutes after the time delay and protect the lights went out, if the back door is not closed or malfunction with the current relay, protect will normally on.
 
 
 
 
 
3) open the high voltage, the high voltage will reach over 10KV, adjust the beam flow to about 200mA, the curtain grid is 20V/100mA, the filament current is 1.2a, and the deflection current swings between 1 and 1.7.
 
 
 
 
 
3 shutdown sequence
 
 
 
 
 
1) turn off the high vacuum gauge head and the molecular pump.
 
 
 
 
 
2) when the molecular pump displays to 50, turn off the high valve, the front stage and the mechanical pump successively, which will take about 40 minutes.
 
 
 
 
 
3) turn off the maintenance pump when it reaches below 50.
 
 
 
 
 
Third point
 
 
 
Application scope of vacuum coating equipment
 
 
 
 
 
1. Architectural hardware: sanitary ware hardware (such as water faucet), door lock, door handle, sanitary ware, door lock, hardware hinge, furniture, etc.
 
 
 
 
 
2, watch industry: can be used for watchcase, watchband coating, crystal products.
 
 
 
 
 
3, other hardware: leather hardware, stainless steel tableware, glasses frame, knives, molds, etc.
 
 
 
 
 
4, large workpiece: automobile wheel hub, stainless steel plate, sign, sculpture, etc.
 
 
 
 
 
5. Stainless steel tubes and plates (various types of surfaces)
 
 
 
 
 
6. Furniture, lamps and lanterns, hotel appliances
 
 
 
 
 
7, lock, handle, hardware, golf head, stainless steel tableware, hardware products such as blood plating hard decorative film.
 
 
 
 
 
8, glasses, jewelry and other decorative wear resistant plating (gold and silver) nano film and nano film and nano layer film.
 
Maintenance and maintenance methods
 
 
 
 
 
1. The vacuum coating equipment should be cleaned once every 200 or more coating procedures are completed.
 
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